Figure 1 to enhance OEE by using EES Figure 1's source is ISMT. It is to show the Advanced Process Control(APC), Advanced Equipment Control(AEC), FDC a Figure is the roadmap proposed by SEMI 1st Symposium on Current SEMI Standards Information & Control Activity-8 Oct.2002.

Lumax to fulfill SEMI EES roadmap provides the data acquisition platform AutoFABTM： (a) Comply with SEMI PR8 proposed standard (b) Combine data from Wafer, Array, Cell and Facility (c) (c) Extensibility, uniform, flexibility and integrated platform AutoFAB the EES platform can support all quipment engineering applications, for example, APC applications, AEC application, etc.

AutoFABTM provides a platform toward SEMI e-Diag roadmap